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Pressure measurement

The Bronkhorst High-Tech EL-PRESS pressure sensor is a piezo resistive bridge on the surface of a silicon chip. This chip is drilled out on its reverse side, giving the inside of the chip the form of a pressure diaphragm whose thickness determines the pressure range. When a pressure acts on this chip, the diaphragm flexes, and the resistor values of the bridge alter in proportion to the pressure. The measuring cell is separated from the external pressure by a thin, sensitive stainless steel diaphragm, and the sealed off cavity between diaphragm and cell is filled with oil.

Bronkhorst EL-PRESS Pressure Sensor